Large-scale array of small high-Q microdisk resonators for onchip spectral analysis

摘要

We demonstrate on-chip, large-scale arrays of small high-Q microdisk resonators, suitable for both in-plane coupling and out-of-plane (imaging) spectral analysis devices with high resolution (linewidth ≪ 50pm to 0.5nm), and large FSR (≫ 50nm).