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>Development of a hightly transparent fluorescent optical sensor for transverse positioning of multiple elements with respect to a reference laser beam
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Development of a hightly transparent fluorescent optical sensor for transverse positioning of multiple elements with respect to a reference laser beam
Abstract: A new type of highly transparent (95%) two dimensional position sensor has been developed which allows the accurate positioning (below 10 micrometers r.m.s.) of successive elements to which each sensor is attached, transversely to a laser beam used as a reference straight line. The present useful area of the sensor is about 15 $MUL 15 mm$+2$/, and can be further increased. !3
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机译:摘要:已开发出一种新型的高度透明(95%)的二维位置传感器,该传感器允许与每个传感器相连的连续元素精确定位(低于10微米rms),横向于用作参考直线的激光束线。传感器的当前可用面积约为15 $ MUL 15 mm $ + 2 $ /,并且可以进一步增加。 !3
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