High Quality Laser Cutting Engineering Ceramics

摘要

A mechanical chopper Q-switched CO_2 pulse laser with 15kW peak power, 6 μs pulse duration, 20kHz pulse repetition rate, 500W average power and near Gaussian mode is developed. Using this laser, a multi-pass cutting process with high cutting speed is proposed for cutting hard and brittle materials such as engineering ceramics. Crack-free and fine cut is obtained in cutting Si_3N_4 ceramics. Moreover, the mechanism and parameter optimization of the process are qualitatively analyzed in the paper.