Studies on the Surface Quality of the Unsteady-state Grinding Technique

摘要

Ultra-precision grinding for advanced ceramics has been achieved by the unsteady-state grinding technique. This paper mainly dealsrnwith observing and analyzing the surface quality of the silicon nitride ground by pink fused alumina wheel in different grindingrnparameters. To optimize the grinding parameters in the process of the unsteady-state grinding, the experiments of X-ray diffraction,rnenergy spectrum analysis, SEM observation and roughness measurement were performed. The results show that there do exist optimumrngrinding conditions such as grain size, coolant, and cutting depth etc. Finally, the surface roughness of Ra can be up to 0.01μm in thernoptimum conditions.