Theoretical Analysis of Nano Displacement of Nanometer Precision Actuator and Its Application

摘要

This paper puts forward a mechanical and electrical step actuator of nanometer precision, whichrnconsists of a step motor of large fine-dividing number of step angle, shaft couplings, a decelerator of largerndecelerating ratio, a screw mechanism and a pole of U shape. It has the minimum step displacement of 10nm, thernstep displacement precision of 1nm, the step frequency of 4KHz, the maximum loadability of 20Kg. The paperrnestablishes the constitutive equation of 3-D stress and the strain coordinate equation of the composing system ofrnthe nanometer precision actuator. As a result, the theoretical relation among stress and strain and displacement isrnset up. The elementary analysis results show that the nanometer precision actuator can be applied in STMrnnanofabrication.