Backside Infrared Imaging using Improved Refraction-Assisted IlluminationMethods

摘要

Infrared backside imaging using refraction assistedrnillumination (RAIL) allows for imaging microelectronicrndevices at high contrast and resolution through 700 microns ofrnsilicon without the need for specialized optics or coatings.rnHowever, due to the angle of illumination, not all of the metalrnfeatures are equally illuminated. In this paper we presentrnimprovements on this method through image composition of arnseries of RAIL images taken at various illumination directions.rnThe resultant composited image provides more uniformrnillumination and better approximates the features seen inrnscanning laser confocal microscopy.