Electroluminescence Analysis by Precise Tilt Polish Technique ofEdge-Emitting Laser Diode

摘要

We have employed electroluminescence (EL) analysis of anrnedge-emitting laser diode (LD) to detect possible defects. Tornextract EL emission from a LD, we developed a tilt polishrntechnique of the bottom electrode. We can successfullyrnobserved clear EL emission. A high yield of 99.2 % wasrnachieved by the introduction of the precise tilt polishrntechnique.