High Speed Laser Projection Imaging and Via Generation Systems for Volume Production

摘要

1. Laser Projection Imaging (LPI) systems are attractive for volume production of high-density printed circuits and other microelectronic systems fabricated on large panels (rigid or flexible). 2. The LPI systems are capable of high resolution - minimum feature sizes (lines, spaces, holes) down to 10 microns (0.4 mil). 3. Being projection systems, they eliminate shortcomings of contact printers (defects, low yield, poor alignment, low resolution) as well as direct-write tools (low throughput, requirement of special resists, low resolution). 4. The LPI systems provide very precise alignment capability --layer-to-layer, mask-to-board, or front-to-back alignment down to 2.5 microns (0.1 mil). 5. By using a high-power excimer laser source, the LPI systems deliver high throughputs -- up to 6 sq. ft./min for imaging and tens of thousands of vias/sec for via generation. 6. The LPI systems deliver the above exposure throughput and resolution performance with conventional photoresists (dry-film or liquid) and conventional masks (mylar or glass). 7. For volume production, the LPI systems provide the lowest cost of ownership and rapid insertion in a manufacturing line, requiring no changes in process steps or materials.