Formation of complex Al-N-C layer in aluminium by successive carbon and nitrogen implantation

摘要

The results of Auger electron spectroscopy and transmission electron microscopy of the surface layer of aluminium after successive implantation by carbon and nitrogen ions are presennted in this work. The energy of implanted ions is 40 keV. The implantation dose varies in the range (3.3-6.5)X10~17 ions/cm~2. The findings show that successive implantation leads to the formation fo two main layers in aluminium. The first layer is AlNC_x (0