Sapphire (#alpha#-Al_2O_3) single crystals were implanted with different doses of Pt and W ions in the range of 1X10~14 at.cm~2 to 5X10~16 at/cm~2 at room temperature. Detailed angular scans through the main axial directions show that up to 10~15 at/cm~2 fluences about 80
展开▼
机译:在室温下,将蓝宝石(#alpha#-Al_2O_3)单晶植入1x10〜14 at.cm〜2到5X10〜16 at / cm〜2范围内的不同剂量的Pt和W离子。通过主轴方向的详细角度扫描显示,大约10〜15 at / cm〜2的通量大约为80
展开▼