Abstract: The study of microscopes for shortwave light such as x rays has made much progress in recent years. Accordingly, the demand for a super-smooth aspherical optical element is increasing. The purpose of this research is to achieve a 0.08 $mu@m or less surface figure error (relative accuracy 10$+$MIN@7$/), and a 0.2 nm rms or less surface roughness on freeform surface optical elements of 500 mm in diameter or more. In order to improve the degree of surface roughness, we used a local pitch polishing method that had a profile generation possibility. A surface roughness of less than 0.06 nm rms was achieved by the end of 1990 using the fused silica. In order to improve figure accuracy and ripple, we developed the Canon Super Smooth Polisher (CSSP) which corrects the figure error by an on-machine measurement and developed a profile generating algorithm by early 1991. In this paper, we describe the results of studies on super-smooth polishing methods and the evaluation results of the CSSP system. !8
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机译：【摘要】近年来，诸如X射线等短波显微镜的研究取得了很大进展。因此，对超光滑非球面光学元件的需求正在增加。本研究的目的是在500 mm的自由曲面光学元件上实现0.08 $ mu @ m或更小的表面图形误差（相对精度10 $ + $ MIN @ 7 $ /），以及0.2 nm rms或更小的表面粗糙度直径以上。为了提高表面粗糙度，我们使用了具有轮廓产生可能性的局部间距抛光方法。到1990年底，使用熔融石英的表面粗糙度小于0.06 nm rms。为了提高图形精度和波纹度，我们开发了佳能超级平滑抛光机（CSSP），它可以通过在机测量来校正图形误差，并在1991年初开发了轮廓生成算法。在本文中，我们描述了研究结果超光滑抛光方法的研究以及CSSP系统的评估结果。 ！8
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