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Design and simulation of a 2-DOF parallel linear precision platform utilizing piezoelectric impact drive mechanism

机译:利用压电冲击驱动机构的二维自由度并联线性精密平台的设计与仿真

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摘要

With rapid developments of microano science and technology, precision platforms are widely required in the researchand industry fields. This paper presents a 2-DOF parallel linear precision platform utilizing piezoelectric impact drivemechanism. With symmetrical flexible structure and specific piezoelectric driving manner, effective and decoupledactuation of the stator is achieved. FEA simulations are conducted to investigate the characteristics of the stator. Withestablished dynamic model of the platform, motion responses of stator and slider in the two directions are simulated andanalyzed. With simultaneous actuation of the 2-DOF motions, a motion interaction phenomenon is raised and discussed.
机译:随着微/纳米科学技术的飞速发展,精密平台在研究\ r \ n工业领域中被广泛使用。本文提出了一种利用压电冲击驱动器\ r \ n机制的2-DOF并联线性精密平台。通过对称的柔性结构和特定的压电驱动方式,实现了定子的有效和解耦。进行有限元分析以研究定子的特性。通过建立平台的动力学模型,可以模拟和分析定子和滑块在两个方向上的运动响应。随着2-DOF运动的同时致动,提出并讨论了运动相互作用现象。

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  • 会议地点 1996-756X;0277-786X
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    School of Instrument Science and Opto-electronics Engineering, Hefei University of Technology,Hefei, Anhui 230009, China clpan@hfut.edu.cn;

    School of Instrument Science and Opto-electronics Engineering, Hefei University of Technology,Hefei, Anhui 230009, China;

    School of Instrument Science and Opto-electronics Engineering, Hefei University of Technology,Hefei, Anhui 230009, China;

    School of Instrument Science and Opto-electronics Engineering, Hefei University of Technology,Hefei, Anhui 230009, China;

    School of Instrument Science and Opto-electronics Engineering, Hefei University of Technology,Hefei, Anhui 230009, China;

    School of Instrument Science and Opto-electronics Engineering, Hefei University of Technology,Hefei, Anhui 230009, China;

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