Surface Acoustic Wave Resonator Pressure Sensor

摘要

A new type of SAW (Surface Acoustic Wave) resonator pressure sensor is introduced in this paper. Firstly, the working principle of the SAW resonator is given and the daul-resonator beat-frequency method used in this principle is analyzed in detail. Then, employing this method, the temperature compensation is implemented and the sensitivity of such sensor is improved. Finally, the measured results are presented. surface acoustic wave; resonator; resonator pressure sensor