CHARACTERIZATION OF POLYSILSESQUIOXANE BASED LOW-K DIELECTRICS

摘要

Structural characterization of polysilsesquioxanes was conducted using IR spectroscopy. It was found that hydrogen and phenyl silsesquioxane polymers exhibit more symmetric ring structure compared to that for methyl silsesquioxane before curing and structural transformation occurs as increasing the cure temperature. The onset temperature of structural transformation is highly dependent on the organic group R. In addition, IR and NMR analysis show that the preparation condition of silsesquioxane polymers has a significant effect on the chemical structure, functionality and molecular weight. Variation in mechanical properties of polysilsesquioxane was also examined as a function of curing time, temperature and molecular weight using TBA, nanoindenter and microvicker test.