Getters: Micromolecular Scavengers for Packaging

摘要

MEMS has become a very hot technology during the past year but there are a host of issues that require economical technical solutions. Getters will play a key role in MEMS and MOEMS packaging. Dual-purpose moisture-particle getters appear ideal and are already used in some optical MEMS commercial products. More work needs to be done in this area, especially for quasi-hermetic packaging. A getter may enable lower cost packaging such as adhesive sealing or even plastic packaging.