Micropatterning cathode separator for high resolution organic light-emitting diode with negative and positive type photoresists

摘要

Organic light emitting diodes (OLEDs) have been paid lots of attention for its potential lighting and display applications. The fabrication of separator to serve the metallic cathode effectively is a crucial process to obtain high resolution OLEDs display panel. In this work, both negative type photoresist photosensitive polyimide and positive photoresist AZ5214 with image reversal characteristic are used to fabricate the cathode separator with an easy-processing photolithography method. The exposure and developing process are simulated, and then the separator pattern with reversal trapezoid profile is fabricated for high resolution devices.