Micro-structuring of Photonic Materials by Deep-ultraviolet Laser

摘要

157nm deep-ultraviolet laser is considered as one of good 3D micro-structuring tools. In this study, a micro-fabrication system based on the 157 nm laser is conducted to micro-structuring experiments of photonic materials. For laser ablation of fused silica, the ablation rate is about 80nm/pulse under laser fluence of 5 J/cm~2. A micro-hole array is produced in silica glass chip, and several 3D microstructures are ablated into SMF-28 optical fibers. Experiments and analysis show that, material removal is dominantly photon-chemical process in case of 157nm laser machining.