Preparation and Anti-Oxidation Properties of Ti(CN) Films Deposited by P CVD

摘要

Using metallo-organatic compound TPT as the source of Ti, H13 mould steels were coated with Ti(CN) films by plasma-assisted chemical vapor deposition (PCVD) and the properties of Ti(CN) films were studied. Under the appropriate temperature and pressure, Ti(CN) films on H13 mould steel surfaces had the highest micro-hardness of HV1760 at 500℃, and the films showed excellent anti-oxidation property below 500℃. The lifetime of Ti(CN)-coated augers and dies could be enhanced 7 and 4 times longer than those of untreated respectively.