Composition Gradient Hard Coatings by Arc Ion Plating

摘要

Arc Ion Plating can be used to synthesize multi-component composition gradient hard coatings by adjusting arc currents of metal targets. The present work aims at a comprehensive description of such a technique. The examples of TiAl multi-layer alloy coatings and (Ti, M) N composition-gradient films were taken (M representing Zr, Nb etc.) for the purpose of explaining the working process and evaluating practical effects. The results show that this technique has the advantages of easy manipulation, rapid deposition, and wide composition range.