The Status of the Carbon Electron Emitting films for Display and Microelectronic Applications

摘要

In recent years the study and the proposed applications of carbon-related field emission devices increased considerably. The main reason for the enhanced activity is that various forms of carbon show very interesting properties and as a result can be used in wide areas of applications, such as: field emitters for flat panel displays, plasma starters, semiconductor devices, e- beam lithography, etc. Another reason is the delay in the introduction of "Spindt" type field emission devices (FEDs), although some companies showed prototypes of color displays larger than 10" diagonaf. The state of the art of the research results of carbon cold cathodes will be presented. Various forms of carbon materials, such as graphite, diamond, carbon nanotubes (fibers) and amorphous carbon containing diamond-like carbon (DLC) will be compared and analyzed in light of their potential applications in the field of flat panel displays and microelectronics.