Theoretical Calculation and Measurement for the Elastic Modulus of TiN film

摘要

The evaluation of the clastic constant of a designated (hkl) plane is important for the residual stress calculations from strain data measured by e.g. the x-ray diffraction method. This study used four-point bending to calibrate the x-ray elastic constants of (422) and (331) planes of TiN film. The theoretical analysis was carried out using the Kroner model. The calculated values were in good agreement with the experimental results. For the measurement of the elastic constants for thin films, texture and columnar grain size of the deposited film may result in a large scatter of the x-ray diffraction results.