Parameters of soft x-ray sources equipped with polycapillary halflens at the exit

摘要

Intensity distribution of Mo L X-rays (2.3 keV) at the half-lens exit was measured, as well as the parameters of the electron induced X-rays source were studied. The measurements have shown that efficiency of production of X-rays with 1.5-2 keV depends on electron energy and reaches its maximum within the electron energy range of 10 keV - 15 keV. Efficiency of K Al and L Mo X-rays production at the half-lens exit was studied, when excited by electron beam under rotating cylinder anode and flat stationary anode conditions. Measurement results are compared to the calculations and data of other experiments.