Research on Pneumatic Control Technology of Medium and Large Diameter Double-sided Polishing Machine

摘要

Pneumatic loading system is an important part of the control system of double-sided polishing machine. It realizesultra-precision polishing of work piece by accurately controlling the pressure of the upper polishing disc loaded on theupper surface of the work piece. Pneumatic loading system is a typical nonlinear, time-varying system. The traditionalPID control parameter setting is very complex, and it is difficult to meet the control requirements. In order to accuratelycontrol the parameters of the PID control, this paper will join the fuzzy control block in front of the PID control, makeerror and error change rate as input of fuzzy control, and PID control parameter as output, according to the selectedmembership functions and fuzzy rules correction the PID control parameters in real time, constitute adaptive fuzzy PIDcontrol. This control strategy can effectively control the pneumatic loading system, with strong stability and robustness.To achieve the stable control of polishing pressure, satisfy the accuracy requirements of medium and large diameterdouble-sided polishing machine.