Spatial Profile of Charged Dust Particles in RF Plasma with a Ring-Shaped Antenna

摘要

In the system of separate operation of plasma production and dust levitation, the dynamics of charged dust particles in the RF plasma was studied. Ring-shaped RF antenna in the chamber was adopted for the plasma production and the levitation electrode was located far from the ring-shaped antenna. The flask shaped dust cloud was observed and its shape changed when the electrode bias and position of ring-shaped antenna was controlled.