Developmemt of High-Speed Microactuators Utilizing Sputter-Deposited TiNi-Base Shape Memory Alloy Thin Films

摘要

Among Ti-Ni, Ti-Ni-X (X=Pd, Cu, Zr, Pt and Au) alloy thin films which have been developed by the present authors' research group, the Ti-Ni alloys revealing the martensitic transformation (M-transformation) and rhombohedral phase (R-phase) transformation and the Ti-Ni-Pd alloy are picked up to compare their shape memory and actuator characteristics. The Ti-Ni-Pd is characterized by high transformation temperatures and the Ti-Ni revealing the R-phase transformation is characterized by small transformation temperature hysteresis and small transformation strain, thus they are expected to show quick response in actuation. The working frequency of the microactuators utilizing the Ti-Ni-Pd thin film and Ti-Ni thin film with the R-phase reached lOOHzand 125Hz, respectively. In this paper, characteristics of these microactuators are reviewed.