The AFM Measuring Technology and Image Analysis in the Fabrication Process of Diffraction Grating

摘要

Aiming at the topographic characteristics of the diffraction grating and the working principle of AFM, the measuring technology including the measures to eliminate the artifacts and image analysis in the grating fabrication process are given. Extended abstract AFM (Atomic Force Microscopy) is an important measuring instrument which has nanometer resolution. The diffraction grating is the key optic component in the spectral instrument. The AFM measuring technology can be introduced to acquire the topography of the diffraction grating in the fabrication process of grating.