Measurement of Adhesive Force between Micro Surfaces with a Novel Micro Leverage Structure

摘要

Unlike that in macro scale, adhesive force becomes a important factor in micro dimensions in the area of MEMS and NMES. Therefore, it is one of the key parameters that need measuring and modeling. A novel micro mechanical structure called "micro leverage" was presented to measure adhesive force. The value of the adhesive force between different surfaces can be simply obtained through the electrostatic voltage that balance the required adhesive force. The principle of "micro leverage" was discussed in details, and a novel process that we called alternative silicon dissolved process is used to fabricate the structure for the advantage of anti-sticking. At the end of the paper, the idea is demonstrated by testing results on gold-gold surfaces.