Plasma parameters and active particles kinetics in HBr dc glow discharges

摘要

The study of the direct current (dc) glow discharge plasma parameters and active species kinetics in HBr (p=30-250 Pa, i_d=10-30 mA) was carried out using the O-dimensional self-consistent steady-state model. The model included the Boltzmann kinetic equation, the balance equations for both neutral and charge particles, plasma conductivity equation and the quasi-neutrality conditions for volume densities of charged particles as well as for their fluxes to the reactor walls. The final set of cross-sections of electron impact processes for HBr molecules was optimized based on the recent literature data. The data on the steady-state electron energy distribution function, electron gas characteristics (mean energy, drift rate and transport coefficients) and volume-averaged densities of plasma active species were obtained as functions of gas pressure and discharge current.