Discrete-time sliding-mode control for processes with time delay and its application to cooling plate for semiconductor manufacturing

摘要

This paper is concerned with the simple design method of sliding-mode control (SMC) for processes with time delay. The proposed method is based on a sliding-mode control using a disturbance observer with compensation for "Pade-approximation error" that does not satisfy the matching condition. Moreover, we propose the optimal pole assignment algorithm of the observer designed by using the approximation model. Experimental results illustrate the effectiveness of the proposed method with applying to the cooling plate for semiconductor manufacturing. The results show that accurate and high-speed temperature control of the plate is achieved by the proposed method.