NOVEL FABRICATION METHODS FOR SUBMICRON JOSEPHSON JUNCTION QUBITS

机译：亚微米约瑟夫逊结量子位的新型制造方法

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Novel processes for the fabrication of mesoscopic Josephson junctions will be described. The junctions are based on superconducting Al/Al_2O_3/Al tunnel junctions, fabricated by electron beam lithography using resists and standard processes that are compatible with conventional CMOS processing.

机译：将描述制造介观约瑟夫森结的新颖工艺。这些结基于超导Al / Al_2O_3 / Al隧道结，该结通过电子束光刻技术使用与常规CMOS工艺兼容的抗蚀剂和标准工艺通过电子束光刻技术制造而成。

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来源
《International Conference on Materials for Microelectronics; 20001016-20001017; Dublin; IE》|2000年|P.71-74|共4页
会议地点 Dublin(IE)
作者
A Potts; PR Routley; GJ Parker; JJ Baumberg; E Di Nicolo; PAJ de Groot;
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作者单位

Department of Electronics and Computer Science University of Southampton Highfield Southampton SO17 1BJ United Kingdom;

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原文格式 PDF
正文语种 eng
中图分类工程材料一般性问题;
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1. Fabrication of submicron La_(2-x)Sr_xCu0_4 intrinsic Josephson junction stacks [J] . Yuimaru Kubo(久保結丸), Yamaguchi Takahide (山口尚秀), Takayoshi Tanaka (田中孝尚), Journal of Applied Physics . 2011,第3期

机译：亚微米La_（2-x）Sr_xCu0_4本征约瑟夫森结堆叠的制备
2. Aluminum hard mask technique for the fabrication of high quality submicron Nb/Al-AlO_x/Nb Josephson junctions [J] . Kaiser C.H., Meckbach J.M., Ilin K.S., Superconductor Science & Technology . 2011,第3期

机译：铝硬掩模技术用于制造高质量亚微米Nb / Al-AlO_x / Nb Josephson结
3. Fabrication of submicron YBCO Josephson junctions by a sample mosaic navigation assisted laser etching process [J] . U Buttner, G L Hardie, R Rossouw Superconductor Science & Technology . 2007,第11期

机译：通过样品镶嵌导航辅助激光蚀刻工艺制造亚微米YBCO Josephson结
4. Novel fabrication methods for submicron josephson junction QUBITS [C] . Potts, A., Parker, . 2000

机译：亚微米约瑟夫逊结QUBITS的新颖制造方法
5. A Josephson junction qubit. [D] . Berkley, Andrew J. 2003

机译：约瑟夫森路口量子位。
6. Anodization-based process for the fabrication of all niobium nitride Josephson junction structures [O] . Massimiliano Lucci, Ivano Ottaviani, Matteo Cirillo, 2017

机译：基于阳极氧化的所有氮化铌约瑟夫森结结构的制造工艺
7. CMOS compatible fabrication methods for submicron Josephson junction qubits [O] . Potts A., Parker G.J., Baumberg J.J., 2001

机译：亚微米约瑟夫森结量子比特的CmOs兼容制造方法

NOVEL FABRICATION METHODS FOR SUBMICRON JOSEPHSON JUNCTION QUBITS

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