FABRICATION AND CHARACTERIZATION OF NANO-SCALE REFERENCE MATERIALS WITH SCANNING PROBE MICROSCOPY(SPM)-BASED LITHOGRAPHY

摘要

Three SPM-based techniques were put forward to fabricate 1D and 2D nano-scale Reference Materials, i.e. Atomic Force Microscopy (AFM) tip-induced anodic oxidation on Si substrate, Scanning Tunneling Microscopy (STM) current-induced oxidation on Ti film as well as AFM tip-scratching on Au film. The experimental parameters were analyzed and classified. Based on the optimization of the respectively experimental parameters, 1D and 2D nano-scale Reference Materials were fabricated. The fabrication accuracy of nano-scale Reference Materials was analyzed, and the relations between the accuracy of the grating line and the respectively experimental parameters were also obtained.