Micromachining of fine trench pattern in glass and metal by photoblasting

摘要

Photoblasting process consists of photofabrication of PDMS mask patterns and blasting with an abrasive jet. This technique was applied to fabricate fine structures on glass and metal substrates. Effects of material removal mode, brittle or ductile, and an incident angle of the abrasive jet to the substrates on removal rate and trench profile were studied.