PATTERNING METHOD FOR HIGHLY FINE RIB, PATTERNING METHOD FOR LOW MELTING POINT GLASS, MOLDING METHOD FOR HIGHLY FINE RIB MADE OF LOW MELTING POINT GLASS, AND ETCHING COATING USED FOR PATTERNING OF HIGHLY FINE RIB

摘要

PROBLEM TO BE SOLVED: To prevent damage of a low melting point glass during break-away of a resist, by forming a coating made of a material other than the low melting point glass and a photosensitive resin that are capable of etching in a machining board surface, forming a making pattern from an etching-resistant resist, and forming a negative pattern of a rib on the coating with etching.;SOLUTION: A material that is made of a material other than a low melting point glass and a photosensitive resin and is capable of etching is coated on a substrate to form a coating, this surface is patterned by an etching-resistant resist, and the low melting point glass is buried in a clearance where this material is patterned by etching. The etching-resistant resist on the surface is broken away or removed, and residual coating is etched and removed. In this case that a photosensitive dry film is used as the etching resistant resist, it can be perfectly baked and removed by selecting a baking condition and the buried low melting point glass can be removed without break-away.;COPYRIGHT: (C)2000,JPO