Sub-diffractive microstructure fabrication by ultrafast laser

摘要

Effective threshold property for two-photon absorption photo-polymerization (TPP) of resins is investigated. Based on the distribution function of Gauss laser and critical concentration of free radical, expression of lateral resolution and polymeric threshold of photosensitive resin are deduced. With properly selected laser pulse energy, lateral resolution of 0.62μm is achieved. Finally, we have depicted some microstructures which illustrate a much promising method for the fabrication of three-dimensional micro- and nanostructures.