Micromachined high sensitive inclinometer based on thermal micro-convection

摘要

Techniques of micromachining silicon are used in order to manufacture a thermal inclinometer working on convective heat transfert. This type of sensor requires no solid proof mass and lower in cost. Sensor shows a sensitivity of 6.96℃/degree of tilt, a resolution of less than 5.7x10~(-4) degree of inclination corresponding to an acceleration noise of 6μg / Hz~(1/2) and a very good stability over time of 3.6.10~(-6) degree/hour for our experimental conditions.