Mechanism and Control of Linear Positioning for IC Wire Bonders

摘要

Chip packaging is an important process during IC manufacturing, which determines the IC productivity and performance to a great extent. Wire bonders are key equipments of chip packaging. The development trend of high performance wire bonders leads to the needs that the positioning stage, which is the basic component used in wire bonders, possess high dynamic performance and high steady precision. Currently the positioning stage consists of the parallel mechanism and direct-drive linear servomotors. This paper firstly reviews the current development of wire bonders, and investigates the performance of linear positioning used in wire bonders. Secondly, various advanced linear drive components are compared, and it is can be concluded that voice coil motor is the most ideal actuator in wire bonders. Finally, the control methods used in linear motors are investigated and their applicability is indicated respectively.