Atmospheric DBD Plasma and its Application to Surface Modification of Materials

摘要

Dielectric barrier discharge (DBD) is characterized by the presence of at least one insulating layer in contact with the discharge between two planar or cylindrical electrodes connected to an ac power supply. The main advantage of this type of electrical discharge is that nonequilibrium plasma conditions in atmospheric-pressure gases can be maintained in an economic and reliable way. This has led to a number of important applications including industrial ozone generation, plasma-chemical vapour deposition, pollution control, excitation of CO_2 lasers, excimer lamps, and most recently, large-area flat plasma-display panels, in which extensive work in material processing has been done successfully. In a plasma source, there are a sufficient amount of energetic particles as well as the same amount of negative and positive charged particles. Bombing and etching the surface of materials will significantly modify the physical and chemical properties of the surface. However, most works are on low gas pressures condition, which requires a vacuum system, thereby limiting their range of applications. In order to avoid the expensive, a renewed interest is in generating high-pressure nonequilibrium plasma, particularly at atmospheric pressures. This has been driven by the advantage that these plasmas offer in comparison to lower pressure plasmas.