Sputter Deposition of Thin Film NiTi/Terfenol Multilaminate for Vibration Damping

摘要

Magnetostrictive materials hold promise to be very effective for passive vibration damping due to its high stiffness and good material loss factor. Additionally, the domain wall motion mechanism of damping occurs at very low strains and wide temperature ranges, allowing for damping at strains below 2000ppm and temperatures from -80℃ to 350℃. Terfenol-D thin film is sputtered deposited and characterized using XRD, WDS, SEM, and SQUID. The terfenol film exhibited compositional stoichiometry similar to that of the target using WDS analysis. XRD showed that dispite having the correct stoichiometry, the sputtered film exhibited extraneous phases other than the R-Fe_2 phase that is predominant in the bulk terfenol-D. SEM pictures indicate films that are very brittle. The brittle nature of terfenol required a multilamination scheme to maintain the robustness of the coating. NiTi film was used to sandwich the terfenol-D, to provide a metal-metal type composite laminate. Finally SQUID measurements of the films magnetic properties showed the presence of magnetic hystersis, and saturation magnetization values that were slightly below that of the bulk. This document explains and demonstrates how to prepare your camera-ready (final paper) manuscript for publishing. The best is to read these instructions and follow the outline of this text. The text area for your manuscript must be 17 cm wide and 25 cm high [Page setup: paper size A4, margins top 2.5 cm, bottom 1.5 cm, left 2 cm, right 2 cm]. Do not place any text outside this area. Please keep this in mind when designing your figures and tables etc. [Text: Times New Roman 12, regular; Alignment: justified; Indentation: none; Paragraph spacing: none; Line spacing: single]