Standards for hybrid microsystems production equipment

摘要

The German standardisation committee DIN NA 027-03-03 AA "Manufacturing equipment for microsystems" started of with the definition of standards for micro assembly equipment. The activities resulted on the one hand in DIN 32561 a standard for a tray to feed micro components into process stations. The format ranges from 2" to 12", with some sizes being compatible to semiconductor equipment standards. This standard is already being used in industry and academia in Germany and in other European countries. To cope with the flexibility issue on the tool side of an assembly machine an endeffector interface (DIN 32565) has been defined. It features flange sizes from 35 mm down to 15 mm. Tool changers that conform to that specification are a standard product by Schunk Spann- und Greifsysteme GmbH & Co. KG. since 2004. Lately the focus of the committee shifts into in other fields such as metrology, LIGA masks and substrates and mould inserts. Moreover the DIN committee increasingly interfaces with research projects in the European 6th framework programme and with international standardisation bodies.