Starting LIGA Microfabrication Capabilities in Canada

摘要

SyLMAND, the Synchrotron Laboratory for Micro and Nano Devices, is currently under development at the Canadian Light Source (CLS) in Saskatoon. The facility will be devoted to X-ray lithography process and applications research and development. Initial research efforts have focused on RF-MEMS applications, which are expected to be a promising market and already generating commercial interest in Canada.