首页> 外文会议>International Autuman Meeting on Gettering and Defect Engineering in Semiconductor Technology;GADEST; 20071014-19;20071014-19; Erice(IT);Erice(IT) >Effect of Hydrostatic Pressure on Self-interstitial Diffusion in Si, Ge, Si Crystals: Quantum-chemical Simulations
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Effect of Hydrostatic Pressure on Self-interstitial Diffusion in Si, Ge, Si Crystals: Quantum-chemical Simulations

机译:静水压力对Si,Ge,Si 晶体自填隙扩散的影响:量子化学模拟

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摘要

A theoretical modeling of the diffusion of self-interstitials in silicon and germanium crystals both at normal and high hydrostatic pressure has been carried out using molecular mechanics, semiempirical (PM3, PM5) and ab-initio (SIESTA) methods. According to the simulation for the Si and Ge neutral interstitials (I~0) both in silicon and germanium crystals more stable configuration is <110> split interstitial. T is the stable configuration for the double positive interstitial I~(++), but the interstitial is displaced from the high-symmetry site. Stability of <110> split-interstitial is not changed under hydrostatic pressure. The activation barriers for the diffusion of interstitials were determined and equal to △E_a(Si)(<110> -> T_1)=0.69 eV; △E_a (Ge)(<110> -> T_1)=1.1 eV. For mixed interstitials the calculated activation barriers equal △E_(mix)~(Si)=1.06 eV, △E_(mix)~(Ge) = 0.86 eV. Hydrostatic pressure decreases the activation barriers △E_a(Si), △E_a (Ge).
机译:使用分子力学,半经验(PM3,PM5)和从头算(SIESTA)方法,对在常压和高静水压下硅和锗晶体中自填隙子的扩散进行了理论建模。根据硅和锗晶体中Si和Ge中性间隙(I〜0)的模拟,更稳定的配置是<110>分裂间隙。 T是双正间隙I〜(++)的稳定构型,但间隙从高对称位置移开了。 <110>间隙的稳定性在静水压力下不会改变。确定了间隙扩散的激活势垒,其等于△E_a(Si)(<110>-> T_1)= 0.69 eV; △E_a(Ge)(<110>-> T_1)= 1.1 eV。对于混合间隙,计算出的激活势垒等于△E_(mix)〜(Si)= 1.06 eV,△E_(mix)〜(Ge)= 0.86 eV。静水压力降低了激活势垒△E_a(Si),△E_a(Ge)。

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