OXIDATION OF ZINC FILMS FOR GROWTH OF ZINC OXIDETHIN FILMS AND NANOSTRUCTURES

摘要

In our studies, a two-step deposition-oxidation method was successfully developed to fabricatevarious ZnO thin films and structures. Morphological observations clearly showed that a controllablegrowth of oxide films, nanowhiskers, and nanowires, could be achieved by controlling the deposition andoxidation conditions. Photoluminescence properties of these ZnO films were also characterized at roomtemperature. A strong and predominant ultra-violet near-band-edge emission could be observed on mostof the samples, while a green or red color emission accompanying with a largely suppressed UV emissioncould be realized on samples with different processing conditions. The results therefore indicated thatZnO films and structures with desirable microstructural and optical properties could be obtained with thisdeposition-oxidation technique under controllable conditions.