The Micro-Motion and Micro-Positioning Mechanism Design of Micromechanical Information Devices

摘要

This paper studies a method of positioning low-mass systems (micromechanisms) that slide on flat surfaces which occur in optical fiber alignment and AFM scanning. First a micromechanism is modeled by a one-degree freedom system and its positioning error is analyzed when it suddenly stops from a constant-velocity motion. It is found what when the static frictional coefficient is large, stick-slip occurs and the positioning error increases. We propose an open-loop control method that decreases positioning error even under the stick-slip condition. The validity of the analysis an dthe effectiveness of the proposed method are verified by an experiment in which an optical fiber is positioned on a glass cylinder.