Low-cost full-field microinterferometer heads produced by hot-embossing technology

摘要

The paper presents concept, summary of numerical modeling and technology chain proposition for fabrication of measurement heads of integrated grating interferometer and interferometric tomograph. In both cases, the measurement head is a monolithic PMMA cuboidal block with diffraction grating integrated. The structures replace a set of bulk optical elements used in classical interferometric setups. Fabrication of the measurement heads by replication is the crucial aspect of significant reduction of proposed system manufacturing cost. Numerical treatment performed in geometrical and scalar-wave regime, covers investigation of external as well as internal properties of the measurement heads. Modeling was also the basis for determination of acceptable measurement head replicas quality, providing proper beam propagation for the both considered interferometric techniques. The technology chain proposed in the paper covers master fabrication and its replication steps leading to fabrication of truly low-cost measurement devices.