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Growth of C_(60) Fullerene Films on Semiconductor Surfaces

机译:C_(60)富勒烯薄膜在半导体表面的生长

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We report on a study of vacuum-deposited thin films of C_(60) fullerene on Si (100) and InP (100) semiconductor surfaces. The film morphology and C_(60)―substrate interactions were investigated by using atomic force microscopy (AFM) and Fourier transform infrared spectroscopy (FTIR). For the film deposition, both patterned Si aand InP surfaces were used. It was found that the stronger interactions occur between C_(60) molecules and Si surface, than between C_(60) molecules and InP surface. On InP surface with microrelief of parallel V-grooves oriented in [011] direction, C_(60) films grow preferentially above the groove walls, with C_(60) grains arrayed in the direction perpendicular to the groove axis.
机译:我们报告了在硅(100)和InP(100)半导体表面上真空沉积C_(60)富勒烯薄膜的研究。利用原子力显微镜(AFM)和傅里叶变换红外光谱(FTIR)研究了薄膜的形貌和C_(60)-底物的相互作用。对于膜沉积,使用了图案化的Si a和InP表面。结果发现,C_(60)分子与Si表面之间的相互作用比C_(60)分子与InP表面之间的相互作用强。在具有沿[011]方向定向的平行V形凹槽的微浮雕的InP表面上,C_(60)膜优先在凹槽壁上方生长,并且C_(60)晶粒在垂直于凹槽轴的方向排列。

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