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MAGNETO-OPTIC MATERIALS FOR INTEGRATED APPLICATIONS

机译:集成应用的磁光材料

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All of the materials necessary for integrated isolators were grown and the application of 2D photonic crystal structures to isolators has been explored. Magneto-optical garnets were grown monolithically by reactive rf sputtering. MgO was used as a substrate because it will useful for future buffer layers and optical claddings. The chemical, structural, and optical properties of the resulting films were analyzed. In order to incorporate photonic crystal structures into the magneto-optic integration scheme, we have calculated a range of radii and spacings necessary to fabricate YIG/air structures with 2D photonic bandgaps using an advanced plane-wave expansion technique. Self-assembled alumina nanostructures have been grown with similar symmetries as those calculated, namely hexagonal close-packed pores. These nanostructures were grown onto semiconductor and oxide substrates in order to demonstrate their use as RIE masks in fabricating photonic crystals. The nanostructures can also be transferred into YIG using separate alumina masks. However, the actual structures grown in this work were smaller than those required for telecommunications due to power supply limitations. For biasing the magneto-optical elements, sputtering was used to monolithically integrate permanent SmCo magnet films using semiconductor-friendly processing. These magnets were sufficient for biasing our magneto-optical waveguides. The chemical, structural and magnetic properties of these materials, as well as total integration with SiO_2 cladding layers were analyzed.
机译:集成隔离器所需的所有材料均已生长,并且已经探索了将二维光子晶体结构应用于隔离器的方法。磁光石榴石通过反应性射频溅射单片生长。 MgO被用作基材,因为它将对将来的缓冲层和光学覆层有用。分析了所得膜的化学,结构和光学性质。为了将光子晶体结构纳入磁光集成方案,我们已经使用先进的平面波扩展技术计算了制造具有2D光子带隙的YIG /空气结构所需的半径和间距范围。自组装氧化铝纳米结构的生长具有与所计算的相似的对称性,即六方密堆积的孔。这些纳米结构生长在半导体和氧化物衬底上,以证明其在制造光子晶体中用作RIE掩模。纳米结构也可以使用单独的氧化铝掩模转移到YIG中。但是,由于电源的限制,这项工作中增长的实际结构小于电信所需的结构。为了偏置磁光元件,使用溅射法通过半导体友好工艺将永久性SmCo永磁膜单片集成。这些磁体足以偏置我们的磁光波导。分析了这些材料的化学,结构和磁性,以及与SiO_2包层的整体结合。

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