Design and fabrication of GaAs-integrated optical chip used in a fiber optic gyroscope

摘要

Abstract: In this paper, we present the design, fabrication and measurement of the GaAs integrated optic chip which is used in fiber optic gyroscope system. The integrated optic chip consists of the single mode waveguide, Y-branch power divider, polarizer and phase modulators. According to the design results, we succeed in fabricating the chip on GaAs/GaAlAs single-heterostructure epitaxial materials which are grown by MBE. The total size of the chip is as small as 10 $MUL 0.5 mm$+2$/. The device has been being measured. We have got two light spots outputting from the device by the measuring system. And the half wave voltage of its phase modulator is about 10 V. !6