Some Current Issues in Nanocalibration and Topographic Measurement

摘要

Making no claim to be a definitive review, a several techniques in nanometrology are examined in order to identify critical challenges for the coming years. First, barriers to the wider application of X-ray interferometry are considered, showing that its use is likely to remain highly specialized. Sub-micrometre surface topography is then used to highlight how basic concepts, sensor technology and analytical software interact to both define and restrict instrument design and International Standards. Measurements should relate to the function of the surfaces, but suffer from poor fundamental understanding of their behaviour. Attempts to reconcile information from stylus contact instruments, from optical instruments and from atomic force microscopes are similarly impeded. Possible approaches to calibration are compared. Consideration of the wider issue of surface integrity shows additional challenges in defining and controlling surface cleanliness and in calibrating nano-friction and nano-harness instruments. Two topics are identified as having wide implications and in need of significant research: good models of probe-surface interactions and methods for calibrating forces to nanonewtons.