Novel Radial Shearing Interferometer Based on Spatial Phase Modulation

摘要

A novel radial shearing interferometer based on spatial phase modulation is simple and stable, and needs only one interferogram. The principle and structure of cyclic radial shearing interferometer are briefly discussed and the process of spatial phase modulation, Fourier transform method and wavefront reconstruction are analyzed. A compact, precise and feasible iteration method is presented. The correction and precision of spatial phase modulation and iteration are validated respectively by simulation and a precision of better than λ / 100 achieved.