Extending Black Silicon imaging to Backside Illumination

摘要

SiOnyx has demonstrated imaging at light levels below 1 mLux at 60 FPS with a 720P backside illuminated CMOS image sensor in a compact, low latency camera. Sub mLux imaging is enabled by the combination of enhanced quantum efficiency in the near infrared, backside illumination for 100% fill factor, and state of the art read noise approaching 2 e/pix. The quantum efficiency enhancement is achieved by utilizing SiOnyx's proprietary ultrafast laser semiconductor processing technology in a backside illuminated architecture for high fill factor and enhanced near infrared absorption. The backside illumination development enables performance approaching fundamental limits.